Grille beam structure construction method for semiconductor factory

ABSTRACT

A grille beam structure construction method for a semiconductor factory is configured to perform construction of grille beams without installation of a separate beam mounting the grille beams and to simplify a joint between the grille beams by using studs for mounting of the grille beams and by integrating grille beam members to each other by bolt-fastening. The method includes installing columns, installing studs between the columns at predetermined intervals longitudinally and transversally, mounting grille beams above the columns and the studs, wherein each of the grille beams includes an rectangular-frame-shaped edge beam and the edge beam has a plurality of fastening holes, and matching the fastening holes between the grille beams and inserting bolts into the fastening holes, thereby integrating the grille beam.

CROSS REFERENCE

The present application claims priority to Korean Patent Application No.10-2022-0093319, filed Jul. 27, 2022, the entire contents of which isincorporated herein for all purposes by this reference.

BACKGROUND

The present invention relates generally to a grille beam structureconstruction method for a semiconductor factory. More particularly, thepresent invention relates generally to a grille beam structureconstruction method for a semiconductor factory, the grille beamstructure construction method being configured to perform constructionof grille beams without installation of a separate beam mounting thegrille beams and to simplify a joint between the grille beams by usingstuds for mounting of the grille beams and by integrating grille beammembers to each other by bolt-fastening, cast-in-place management can becarried out easily and construction quality can be easily secured byminimization of a wet-type construction, safety risk can be reduced byreduction of concrete pouring equipment and manpower, a constructionperiod can be reduced by minimization of cast-in-place work,construction waste can be reduced by exclusion of the formworkinstallation and pouring, and a safe environment can be created byminimization and simplification of cast-in-place work.

Production facilities of a semiconductor factory are getting larger, andwhen a precast grille beam joint used for the semiconductor factory isconstructed with reinforced concrete, a construction method offormwork→joint reinforcement→concrete pouring→curing is applied to theconstruction, a long construction period is required, and starting offollow-up work is delayed.

Furthermore, there is a risk of increasing safety risks whencast-in-place work involving concrete pouring equipment and multiplepersonnel is carried out, and during a curing period after concretepouring, drying shrinkage may occur due to freezing damage in winter andrapid moisture evaporation in summer, so there was a risk of qualitydeterioration.

Specifically, in order to install a grille beam, a separate beam onwhich the grille beam is mounted must be installed, but road transportof the beam is impossible because the length of the beam is long, andthere is a problem in that it is difficult to integrate members of thebeam when the beam is manufactured as segments to overcome the lengthproblem. Accordingly, there is a problem of an increase of aconstruction period.

Korean Patent No. 10-2033671-0000 “Grill beam structure of semiconductorfactory” (Patent Document 1) was proposed as the related art of thepresent invention. In the related art, the grille beam structure of asemiconductor factory is proposed, the grille beam structure beingcharacterized in that the structure includes studs, which are verticalcolumns, installed inside the semiconductor factory and stood atpredetermined intervals in longitudinal and transverse directions,unidirectional beams each mounted to upper portions of two adjacentstuds to connect the two studs to each other across the upper portionsof the studs, and a rectangular grille beam installed in a form offilling a rectangular horizontal area formed by being surrounded theunidirectional beams, wherein a protruding step portion is formed on aside surface of each unidirectional beam and a recessed step portion isformed on a side surface of the grille beam, so that the grille beam isinstalled such that a lower surface of the step portion of each sidesurface of the grille beam is mounted to an upper surface of the stepportion of the side surface of each unidirectional beam. A mortar isinjected into both a gap between ends of two unidirectional beamsassembled on each stud and a gap between the side surface of eachunidirectional beam and each side surface of the grille beam, so thatthe unidirectional beams are jointed at the ends thereof and fixed, theunidirectional beams and the grille beam are jointed and fixed to eachother. A plurality of vertical reinforcing bars are charged inside thestud in a longitudinal direction, and an upper end of each verticalreinforcing bar protrudes above the upper surface of each stud, and avertical reinforcing bar insertion groove is formed on a lower surfaceof each unidirectional beam close to the end thereof to accommodate theupper end of each vertical reinforcing bar protruding above the uppersurface of each stud, so that each vertical reinforcing bar is insertedinto the vertical reinforcing bar insertion groove and thus the stud andthe unidirectional beam are coupled to each other. Both of theunidirectional beams assembled on the stud are cut to form steps onupper edges of ends thereof, and when the ends of the unidirectionalbeams are close to each other in a row on the stud at a predeterminedinterval, as a mortar is injected into a space formed by the steps ofthe ends, the mortar is filled into the space, the gap between the twounidirectional beams, and the gap between the unidirectional beams andthe grille beam and solidifies to couple the unidirectional beams andthe grille beam to each other. The vertical reinforcing bar insertiongroove is formed by penetrating a bottom of the step formed by cuttingthe end of each unidirectional beam, and the mortar filled into thespace formed by the respective ends of the adjacent two unidirectionalbeams is filled into the inside space of the vertical reinforcing barinsertion groove, so that an inner circumferential surface of thevertical reinforcing bar insertion groove and an outer circumferentialsurface of the vertical reinforcing bar protruding above the stud aresecurely coupled to each other. A plurality of step-shaped trenchgrooves is formed on the upper surface of the protruding side step ofeach of the unidirectional beams in a longitudinal direction of each ofthe unidirectional beams, and the mortar injected into the gap betweenthe grille beam and the unidirectional beams passes through horizontalcontact surfaces, which are formed by the side steps in contact withother when each side step of the grille beam is mounted to the side stepof each unidirectional beams, through the trench grooves and then isinjected into an end of a vertical gap at a lower portion between thecontact surfaces. Accordingly, the mortar is injected into all gapsbetween the unidirectional beams and the grille beam from the top to thebottom, so that the grille beam and the unidirectional beams are solidlycoupled to each other.

However, the related art also had a problem in that the separate grillebeam on which the grille beam is mounted must be installed in order toinstall the grille beam.

-   Documents of Related Art: Korean Patent No. 10-2033671-0000 entitled    “Grill beam structure of semiconductor factory”.

SUMMARY OF THE INVENTION

Accordingly, the present invention has been made keeping in mind theabove problems occurring in the related art, and the present inventionis intended to provide a grille beam structure construction method for asemiconductor factory, wherein construction of grille beams is possiblewithout installation of a separate beam for mounting the grille beams sothat a joint is simplified, a wet-type construction is minimized so thatcast-in-place management is carried out easily and construction qualityis easily secured, concrete pouring equipment and manpower are reducedso that a safety risk is reduced, cast-in-place work is minimized sothat a construction period is reduced, formwork installation andconcrete pouring are excluded so that amount of construction waste isreduced, and cast-in-place work is minimized and simplified so that asafe environment is created.

In order to achieve the above objective, according to one aspect of thepresent invention, there is provided a grille beam structureconstruction method for a semiconductor factory, the method including:installing columns; installing studs between one of the columns andanother column at predetermined intervals in longitudinal and transversedirections; mounting grille beams, above the columns and the studs,wherein an rectangular-frame-shaped edge beam is arranged, andtransverse members and longitudinal members intersect with each other tobe grid-arranged in the edge beam, and the edge beam has a plurality offastening holes penetrating horizontally therethrough; and matching thefastening holes between the grille beams to each other and insertingbolts into the fastening holes, thereby integrating the grille beamswith each other.

The grille beams may maintain a space equal to or longer than apredetermined distance therebetween, and a non-shrinkage mortar may befilled into the space.

A backup member may be fitted into a lower end of the space where thegrille beams are in contact with each other and a calking material maybe used therein for sealing of the space.

A filling groove may be formed on a surface of the edge beam of each ofthe grille beams, the surface having the fastening holes, from an upperportion that is located at a predetermined height above a lower end toan upper end of the surface, and after the fastening of the boltsbetween the grille beams, a non-shrinkage mortar may be filled into thefilling groove.

A bolt head seating groove may be formed on an inner surface of the edgebeam while being recessed inward, the inner surface having each of thefastening holes, so that a bolt head of each of the bolts may beprevented from protruding outward after the fastening of the bolts.

An inner corner of the edge beam of each of the grille beams mounted onthe studs may have an inner protrusion part so as to cover a corner ofeach of the studs completely.

An outer surface of the edge beam of each of the grille beams may betreated into a rough surface so that a friction force between the grillebeams may increase when the grille beams are joined to each other.

Each of the studs may include a dowel bar such that the dowel bar mayprotrude upward to a predetermined length, each of the grille beams mayhave a through hole at a portion where the grill beam is mounted on eachof the studs, the through hole may be formed by vertically penetratingthrough a location corresponding to a location of the dowel bar, and thegrille beam may be mounted so that the dowel bar may be inserted intothe through hole, and then a non-shrinkage mortar may be filled into thethrough hole.

The stud may have a recessed groove, and the recessed groove may beformed on an upper surface including the dowel bar to a predetermineddepth, and the non-shrinkage mortar may be filled into both the throughhole and the recessed groove at the same time.

A coupler connection groove may be formed on an upper surface of theedge beam, the upper surface having the through hole, by cutting theupper surface to a predetermined depth, so that an end of an upperreinforcing bar embedded in each of the grille beams may protrude towardthe coupler connection groove to a predetermined length, and acast-in-place fastening reinforcing bar may be located between upperreinforcing bars of adjacent grille beams among the grille beams, andopposite ends of the cast-in-place fastening reinforcing bar may befastened to respective ends of the opposite upper reinforcing bars byusing couplers, and then the non-shrinkage mortar may be filled into thecoupler connection groove.

According to the present invention, the grille beam structureconstruction method for a semiconductor factory of the present inventionis configured to allow the grille beam to be constructible withoutinstallation of a beam, which is provided to mount the grille beam, byusing the studs to mount the grille beam, and by integrating the grillebeam members with each other in the bolt fastening, so that the jointcan be simplified and the construction period can be reduced.

Furthermore, when performing PC construction, since the time requiredfor formwork installation/dismantling, reinforcement placing, concretepouring and curing is unnecessary, early starting of a follow-upconstruction can shorten the construction period. With the fasteningmethod in which the grille beam members are fastened to each other bythe tie bolts and then are filled with the non-shrinkage mortar, it ispossible to secure the high quality of construction by the easyconstruction method and the curing period reduction. The grille beamscan be integrated by the fastening of the tie bolts between the grillebeam members and the non-shrinkage mortar filling, so that the processof cast-in-place concrete pouring can be simplified and thus theconstruction period can be reduced.

Specifically, as described above, there are useful effects in that thecast-in-place management can be carried out easily and the constructionquality can be easily secured by minimization of a wet-typeconstruction, the safety risk can be reduced by reduction of concretepouring equipment and manpower, the construction period can be reducedby minimization of cast-in-place work, construction waste can be reducedby exclusion of the formwork installation and pouring, and a safeenvironment can be created by minimization and simplification ofcast-in-place work.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings in the specification will illustrate apreferred embodiment of the present invention, and provide an improvedunderstood of the scope and spirit of the present invention with thedetailed description of the present invention, so the present inventionshould not be construed as being limited only to the matters describedin the accompanying drawings.

FIGS. 1A, 1B, and 1C are plan views schematically showing a grille beamstructure construction method for a semiconductor factory of the presentinvention.

FIG. 2 is a perspective view showing a precast grille beam of thepresent invention.

FIG. 3 is a plan view showing the precast grille beam of the presentinvention.

FIG. 4 is a partially enlarged plan view showing an embodiment in whichthe precast grille beam of the present invention is constructed.

FIG. 5 is a sectional view taken along line A-A in FIG. 4 .

FIG. 6A is a bottom view showing a joint between precast grille beams.

FIG. 6B is a plan view showing the joint between the precast grillebeams.

FIGS. 7A and 7B are side sectional views showing the joint between theprecast grille beams.

DETAILED DESCRIPTION OF THE INVENTION

Hereinbelow, the present invention will be described in detail withreference to an exemplary embodiment proposed in accompanying drawings,and the embodiment is described for illustrative purposes to provide aclear understanding and the present invention is not limited to theembodiment.

Hereinbelow, according to the exemplary embodiment, technicalconfiguration of the present invention will be described in detail.

FIGS. 1A, 1B, and 1C are plan views showing a grille beam structureconstruction method for a semiconductor factory of the present inventionschematically.

The grille beam structure construction method for a semiconductorfactory of the present invention is configured to cradle grille beams 30by using the studs 20 without installation of separate beams forcradling the grille beams 30, and to integrate the grille beams 30 witheach other in a bolting manner to simplify a joint therebetween.

To this end, the present invention is configured to perform, as shown inFIG. 1A, installing of columns 10.

The installing of the columns 10 proceeds in the order of installing ofanchor frames, placing of foundation concrete, and marking, and then theprecast columns 10 are assembled to the foundation concrete.

After the installing of the columns, as shown in FIG. 1B, the studs 20are installed between one of the columns 10 and another column 10 atpredetermined intervals in longitudinal and transverse directions.

As shown in FIG. 1C, each of the studs 20 is installed at a locationbelow a corner location where corners of all four grille beams 30 arecoupled to each other so as to support the entire structure.

After the installing the studs 20, as shown 1C, the grille beams 30 iscradled above the columns 10 and the studs 20, and in the grille beams30, a rectangular-frame-shaped the edge beam 330 is arranged andtransverse members 310 and longitudinal members 320 intersect with eachother to be grid-arranged in the edge beam 330, a plurality of fasteningholes 332 is formed in the edge beam 330 to penetrate the edge beam 33horizontally, and finally, the fastening holes 332 between the grillebeams 30 match each other and bolts 34 are inserted into the fasteningholes 332 to integrate the grille beams 30 with each other.

FIG. 2 is a perspective view showing the precast grille beam of thepresent invention. FIG. 3 is a plan view showing the precast grille beamof the present invention.

Each of the grille beams 30 consists of the rectangular-frame-shapededge beam 330, and the transverse members 310 and the longitudinalmembers 320 intersecting with each other to form a grid shape in theedge beam 330.

Specifically, according to the present invention, the plurality offastening holes 332 is formed in the edge beam 330 to penetrate throughthe edge beam horizontally to perform integration between the grillebeams 30, and the bolts 34 may be fastened by passing through both theedge beam 330 of one grille beam 30 and the edge beam 330 of an adjacentgrille beam 30.

FIG. 4 is a partially enlarged plan view showing an embodiment in whichthe precast grille beam of the present invention is constructed. FIG. 5is a sectional view taken along line A-A in FIG. 4 .

As shown in FIG. 5 , in coupling between the grille beams 30, a space dequal to or longer than a predetermined distance is maintained betweenthe grille beams 30 and a non-shrinkage mortar 334 is filled into thespace d, so that coupling between the grille beams 30 can be performedby the bolts 340 and the non-shrinkage mortar 334. An outer surface ofthe edge beam 330 of each of the grille beams 30 is treated into a roughsurface so that a friction force between the grille beams 30 increaseswhen the grille beams 30 are joined to each other, thereby improvingjoining performance.

At this point, a backup member 350 is fitted into a lower end of thespace d where the grille beams 30 are in contact with each other, and acalking material is used therein for sealing of the space d s, so thatleakage of the non-shrinkage mortar 334 can be prevented.

Furthermore, a filling groove 333 is formed a surface of the edge beam330 each of the grille beams 30, the surface having the plurality offastening holes 332, from an upper portion a predetermined height abovea lower end to an upper end of the surface. After fastening of the bolts34 between the grille beams 30, the non-shrinkage mortar 334 is filledinto the filling groove 333 so as to ensure that a bolt joint section isa space D wider than the space d between the two grille beams 30, andthe non-shrinkage mortar 334 is filled, so that the joining performanceand the filling groove 333 can serve as a shear key itself.

Specifically, according to the present invention, the grille beams 30are fastened by the bolts 34 and the space d is ensured so that thenon-shrinkage mortar 334 is filled thereinto, and a bolt head seatinggroove 336 is inward recessed on an inner surface of the edge beam 330,the surface having the plurality of fastening holes 332, so that a bolthead is prevented from protruding outward after fastening of each of thebolts 34, thereby excluding interference between the bolt head and afinishing member and an installed pipe (vacuum).

Furthermore, as shown in FIGS. 3 and 4 , in each of the grille beams 30,inner corners of the edge beam 330 mounted to the studs 20 has innerprotrusion parts 331 so as to cover corners of the studs 20 completely,thereby preventing collecting of foreign materials (dust) on an upperportion of the stud 20 in a clean room section.

FIG. 6A is a bottom view showing a joint between the precast grillebeams. FIG. 6B is a plan view showing the joint between the precastgrille beams. FIG. 7 is a side sectional view showing the joint betweenthe precast grille beams.

Specifically, as shown in FIGS. 6A and 6B, the grille beams 30 aremounted to each of studs 20, and each of the studs 20 has dowel bars 260protruding upward to a predetermined length, and each of the grillebeams 30 has a through hole 339 formed by penetrating the grille beam 30vertically at a location corresponding to each of the dowel bars 260 ata portion mounted to each of the studs 20. After the grille beams 30 ismounted such that each of the dowel bars 260 is inserted into thethrough hole 339, the non-shrinkage mortar 334 is filled into thethrough hole 339, so that a hanging length of each of the grille beams30 can be ensured to the studs 20 without a bracket, and the safetyduring construction (removal prevention) can be ensured, and thestructural performance can be ensured by restraining between the studs20 and the grille beams 30.

Furthermore, as shown in FIG. 7 , each of the studs 20 has a recessedgroove 261 formed at a predetermined depth on the upper surface thereofwith the dowel bars 260. Therefore, the non-shrinkage mortar 334 isfilled into both the through hole 339 and the recessed groove 261 sothat the jointing performance can be improved and the seismicperformance can be improved.

According to the present invention, an upper reinforcing bar 370embedded into an upper portion of each of the grille beams may be usedin jointing of the grille beams 30, and at this point, as shown in FIGS.6A, 6B, and 7 , a coupler connection groove 337 is formed on the upperportion of the edge beam 330 at a predetermined depth in a cuttingmanner, and the upper portion having the through hole 339, an end of theupper reinforcing bar 370 embedded into each of the grille beams 30protrudes toward the coupler connection groove 337 to a predeterminedlength. A cast-in-place fastening reinforcing bar 380 is located betweenupper reinforcing bars 370 of the adjacent grille beams 30 and oppositeends of the cast-in-place fastening reinforcing bar 380 are fastened torespective ends of opposite upper reinforcing bars 370 by using couplers381, and then the non-shrinkage mortar 334 may be filled into thecoupler connection groove 337.

Since the upper reinforcing bar 370 embedded in the grille beams 30cannot be adjusted in length, in the embodiment, when the upperreinforcing bar 370 and another upper reinforcing bar 370 are connectedto each other, the cast-in-place fastening reinforcing bar 380 is usedto fasten the upper reinforcing bars 370 to each other so as to correcta joint length error and to easily fasten the upper reinforcing bars370.

In other words, the cast-in-place fastening reinforcing bar 380 islocated between the upper reinforcing bars 370 of the adjacent grillebeams 30, and the opposite ends of the cast-in-place fasteningreinforcing bar 380 are fastened to the respective ends of the upperreinforcing bars 370 by using the couplers 381.

At this point, in order to easily perform fastening of the couplers 381,the opposite ends of the cast-in-place fastening reinforcing bar 380 andthe ends of the upper reinforcing bar 370 are treated in a screw threadprocessing.

As described above, the grille beam structure construction method for asemiconductor factory of the present invention is configured to allowthe grille beam to be constructible without installation of a beam,which is provided to mount the grille beam, by using the studs to mountthe grille beam, and by integrating the grille beam members with eachother in the bolt fastening, so that the joint can be simplified and theconstruction period can be reduced. Furthermore, when performing PCconstruction, since the time required for formworkinstallation/dismantling, reinforcement placing, concrete pouring andcuring is unnecessary, early starting of a follow-up construction canshorten the construction period. With the fastening method in which thegrille beam members are fastened to each other by the tie bolts and thenare filled with the non-shrinkage mortar, it is possible to secure highquality of construction by the easy construction method and the curingperiod reduction. The grille beams can be integrated by the fastening ofthe tie bolts between the grille beam members and the non-shrinkagemortar filling, so that the process of cast-in-place concrete pouringcan be simplified and thus the construction period can be reduced.Specifically, as described above, there are useful effects in that thecast-in-place management can be carried out easily and the constructionquality can be easily secured by minimization of a wet-typeconstruction, the safety risk can be reduced by reduction of concretepouring equipment and manpower, the construction period can be reducedby minimization of cast-in-place work, construction waste can be reducedby exclusion of the formwork installation and pouring, and a safeenvironment can be created by minimization and simplification ofcast-in-place work.

Although the preferred embodiment of the present invention will bedescribed in detail, those skilled in the art will appreciate thatvarious modifications, additions and substitutions are possible, withoutdeparting from the scope and spirit of the present invention. Thepresent invention is not limited to the modifications, additions andsubstitutions of the present invention, but is limited to theaccompanying claims.

What is claimed is:
 1. A grille beam structure construction method for asemiconductor factory, the method comprising: installing columns;installing studs between one of the columns and another column atpredetermined intervals in longitudinal and transverse directions;mounting grille beams, above the columns and the studs, wherein anrectangular-frame-shaped edge beam is arranged and transverse membersand longitudinal members intersect with each other to be grid-arrangedin the edge beam and the edge beam has a plurality of fastening holespenetrating horizontally therethrough; and matching the fastening holesbetween the grille beams to each other and inserting bolts into thefastening holes, thereby integrating the grille beams with each other.2. The method of claim 1, wherein the grille beams maintain a spaceequal to or longer than a predetermined distance therebetween, and anon-shrinkage mortar is filled into the space.
 3. The method of claim 2,wherein a backup member is fitted into a lower end of the space wherethe grille beams are in contact with each other and a calking materialis used therein for sealing of the space.
 4. The method of claim 1,wherein a filling groove is formed on a surface of the edge beam of eachof the grille beams, the surface having the fastening holes, from anupper portion that is located at a predetermined height above a lowerend to an upper end of the surface, and after the fastening of the boltsbetween the grille beams, a non-shrinkage mortar is filled into thefilling groove.
 5. The method of claim 1, wherein a bolt head seatinggroove is formed on an inner surface of the edge beam while beingrecessed inward, the inner surface having each of the fastening holes,so that a bolt head of each of the bolts is prevented from protrudingoutward after the fastening of the bolts.
 6. The method of claim 1,wherein an inner corner of the edge beam of each of the grille beamsmounted on the studs has an inner protrusion part so as to cover acorner of each of the studs completely.
 7. The method of claim 1,wherein an outer surface of the edge beam of each of the grille beams istreated into a rough surface so that a friction force between the grillebeams increases when the grille beams are joined to each other.
 8. Themethod of claim 1, wherein each of the studs comprises a dowel bar suchthat the dowel bar protrudes upward to a predetermined length, each ofthe grille beams has a through hole at a portion where the grill beam ismounted on each of the studs, the through hole is formed by verticallypenetrating through a location corresponding to a location of the dowelbar, and the grille beam is mounted so that the dowel bar is insertedinto the through hole, and then a non-shrinkage mortar is filled intothe through hole.
 9. The method of claim 8, wherein the stud has arecessed groove, and the recessed groove is formed on an upper surfacecomprising the dowel bar to a predetermined depth, and the non-shrinkagemortar is filled into both the through hole and the recessed groove atthe same time.
 10. The method of claim 8, wherein a coupler connectiongroove is formed on an upper surface of the edge beam, the upper surfacehaving the through hole, by cutting the upper surface to a predetermineddepth, so that an end of an upper reinforcing bar embedded in each ofthe grille beams protrudes toward the coupler connection groove to apredetermined length, and a cast-in-place fastening reinforcing bar islocated between upper reinforcing bars of adjacent grille beams amongthe grille beams, and opposite ends of the cast-in-place fasteningreinforcing bar are fastened to respective ends of the opposite upperreinforcing bars by using couplers, and then the non-shrinkage mortar isfilled into the coupler connection groove.